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ISO 14644-14:2016
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration- 발행일 : 2016-09-14
- 발행기관 : ISO
상세정보
| 분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
|---|---|
| 적용범위 | ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644‑1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644‑1). NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required. The following items are not covered by this ISO 14644-14:2016: - assessment of suitability with respect to biocontamination; - testing for suitability of decontamination agents and techniques; - cleanability of equipment and materials; - requirements on design of equipment and selection of materials; - physical properties of materials (e.g. electrostatic, thermal properties); - optimizing performance of equipment for specific process applications; - selection and use of statistical methods for testing; - protocols and requirements for local safety regulations. |
| 국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
| 페이지수 | 21 |
| Edition | 1 |
이력정보
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 14644-14:2016상세보기 | Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration | 2016-09-14 | 표준 |
관련상품
- ISO/DIS 14644-12 - Cleanrooms and associated controlled environments — Part 12: Classification of air cleanliness by nanoscale particle concentration
- ISO/DIS 14644-7 - Cleanrooms and associated controlled environments — Part 7: Separative enclosures (clean air hoods, gloveboxes, isolators, mini-environments)
- ISO 14644-5 - Cleanrooms and associated controlled environments — Part 5: Operations
- ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations
- ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
다른 사람이 함께 구입한 상품
- ISO 14644-13:2017 - Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- ISO 14644-15:2017 - Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
- ISO 14644-10:2013 - Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
- ISO 14644-16:2019 - Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices
- ISO 14644-9:2012 - Cleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentration
추천 상품
- IEC TS 63134:2020 - Active assisted living (AAL) use cases
- IEC 60034-5:2020 RLV - Rotating electrical machines - Part 5: Degrees of protection provided by the integral design of rotating electrical machines (IP code) - Classification
- KS B ISO TS 25740-1 - 에스컬레이터 및 무빙워크에 대한 안전요건 — 제1부: 세계공통 필수 안전요건(GESRs)
- KS B ISO TS 8100-21 - 승객 및 화물 운송용 엘리베이터 —제21부: 세계공통 필수안전요건(GESRs)을 충족하는 세계공통 안전 파라미터(GSPs)
- KS C IEC TS 62872 - 산업 시설과 스마트 그리드 사이의 산업 공정 측정, 제어 및 자동화 시스템 인터페이스
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