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ISO 14644-12:2018
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration- 발행일 : 2018-08-30
- 발행기관 : ISO
상세정보
| 분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
|---|---|
| 적용범위 | This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this document is for use mainly in "operational" states. NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document. |
| 국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
| 페이지수 | 11 |
| Edition | 1 |
이력정보
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 14644-12:2018상세보기 | Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration | 2018-08-30 | 표준 |
| 2 | ISO/DIS 14644-12상세보기 | Cleanrooms and associated controlled environments — Part 12: Classification of air cleanliness by nanoscale particle concentration | 폐지 |
관련상품
- ISO 14644-5 - Cleanrooms and associated controlled environments — Part 5: Operations
- ISO/DIS 14644-7 - Cleanrooms and associated controlled environments — Part 7: Separative enclosures (clean air hoods, gloveboxes, isolators, mini-environments)
- ISO/DIS 14644-12 - Cleanrooms and associated controlled environments — Part 12: Classification of air cleanliness by nanoscale particle concentration
- ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations
- ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
다른 사람이 함께 구입한 상품
- ISO 14644-16:2019 - Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices
- ISO 14644-15:2017 - Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
- ISO 14644-10:2013 - Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
- ISO 14644-13:2017 - Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations
추천 상품
- IEC TS 63134:2020 - Active assisted living (AAL) use cases
- IEC 60034-5:2020 RLV - Rotating electrical machines - Part 5: Degrees of protection provided by the integral design of rotating electrical machines (IP code) - Classification
- KS B ISO TS 25740-1 - 에스컬레이터 및 무빙워크에 대한 안전요건 — 제1부: 세계공통 필수 안전요건(GESRs)
- KS B ISO TS 8100-21 - 승객 및 화물 운송용 엘리베이터 —제21부: 세계공통 필수안전요건(GESRs)을 충족하는 세계공통 안전 파라미터(GSPs)
- KS C IEC TS 62872 - 산업 시설과 스마트 그리드 사이의 산업 공정 측정, 제어 및 자동화 시스템 인터페이스
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