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ISO 14644-10:2022
Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination- 발행일 : 2022-05-04
- 발행기관 : ISO
상세정보
| 분야 | ISO/TC 209 : Cleanrooms and associated controlled environments |
|---|---|
| 적용범위 | This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance. |
| 국제분류(ICS)코드 | 13.040.35 : 클린룸 및 관련 제어 환경 |
| 페이지수 | 31 |
| Edition | 2 |
이력정보
| No. | 표준번호 | 표준명 | 발행일 | 상태 |
|---|---|---|---|---|
| 1 | ISO 14644-10:2022상세보기 | Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination | 2022-05-04 | 표준 |
| 2 | ISO 14644-10:2013상세보기 | Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration | 2013-03-01 | 구판 |
관련상품
- ISO/DIS 14644-12 - Cleanrooms and associated controlled environments — Part 12: Classification of air cleanliness by nanoscale particle concentration
- ISO/DIS 14644-7 - Cleanrooms and associated controlled environments — Part 7: Separative enclosures (clean air hoods, gloveboxes, isolators, mini-environments)
- ISO 14644-5 - Cleanrooms and associated controlled environments — Part 5: Operations
- ISO 14644-5:2004 - Cleanrooms and associated controlled environments — Part 5: Operations
- ISO 14644-7:2004 - Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
다른 사람이 함께 구입한 상품
- ISO 14644-9:2022 - Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
- ISO 14644-8:2022 - Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
- ISO 14644-4:2022 - Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
- ISO 10993-9:2019 - Biological evaluation of medical devices — Part 9: Framework for identification and quantification of potential degradation products
- ISO 14644-13:2017 - Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
추천 상품
- IEC TS 63134:2020 - Active assisted living (AAL) use cases
- IEC 60034-5:2020 RLV - Rotating electrical machines - Part 5: Degrees of protection provided by the integral design of rotating electrical machines (IP code) - Classification
- KS B ISO TS 25740-1 - 에스컬레이터 및 무빙워크에 대한 안전요건 — 제1부: 세계공통 필수 안전요건(GESRs)
- KS B ISO TS 8100-21 - 승객 및 화물 운송용 엘리베이터 —제21부: 세계공통 필수안전요건(GESRs)을 충족하는 세계공통 안전 파라미터(GSPs)
- KS C IEC TS 62872 - 산업 시설과 스마트 그리드 사이의 산업 공정 측정, 제어 및 자동화 시스템 인터페이스
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